GISAXS 101

  (Under construction)

DWBA Theories for GISAXS
(1) Rough surface
(2) Interfaces of multilayers

(3) Supported structures

(4) Embedded structures

 

 

(5) Depth dependence (wave-guide)

References 

[1] Single rough interface (DWBA fundamental)

• S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley. X-ray and neutron scattering from rough surfaces. Phys. Rev. B 38, 2297 (1988). DOI: 10.1103/PhysRevB.38.2297 

[2] Rough interfaces of multilayers

• V. Holy´, J. Kuběna, I. Ohli´dal, K. Lischka, and W. Plotz. X-ray reflection from rough layered systems. Phys. Rev. B 47, 15896 (1993). DOI: 10.1103/PhysRevB.47.15896
• V. Holy´, and T. Baumbach. Nonspecular x-ray reflection from rough multilayers. Phys. Rev. B 49, 10668 (1994). DOI: 10.1103/PhysRevB.49.10668

[3] Supported nano-objects

• M. Rauscher, R. Paniago, H. Metzger, Z. Kovats, J. Domke, J. Peisl, H.-D. Pfannes, J. Schulze, and I. Eisele. Grazing incidence small angle x-ray scattering from free-standing nanostructures. J. Appl. Phys. 86, 6763 (1999). DOI: 10.1063/1.371724
• R. Lazzari. IsGISAXS: a program for grazing-incidence small-angle X-ray scattering analysis of supported islands. J. Appl. Cryst. 35, 406 (2002). DOI: 10.1107/S0021889802006088

[4] Embedded structures 

• B. Lee, J. Yoon, W. Oh, Y. Hwang, K. Heo, K. S. Jin, J. Kim, K.-W. Kim, and M. Ree. In-Situ Grazing Incidence Small-Angle X-ray  Scattering Studies on Nanopore Evolution in Low-k  Organosilicate Dielectric Thin Films. Macromolecules 38, 3395 (2005). DOI: 10.1021/ma048214e

• M. P. Tate, V. N. Urade, J. D. Kowalski, T. Wei, B. D. Hamilton, B. W. Eggiman, and H. W. Hillhouse. Simulation and Interpretation of 2D Diffraction Patterns from Self-Assembled Nanostructured Films at Arbitrary Angles of Incidence: From Grazing Incidence (Above the Critical Angle) to Transmission Perpendicular to the Substrate. J. Phys. Chem. B 110, 9882 (2006). DOI: 10.1021/jp0566008

[5] Depth dependent structures (wave-guides) 

• D. Babonneau, S. Camelio, D. Lantiat, L. Simonot, and A. Michel. Waveguiding and correlated roughness effects in layered nanocomposite thin films studied by grazing-incidence small-angle x-ray scattering. Phys. Rev. B 80, 155446 (2009) DOI: 10.1103/PhysRevB.80.155446 
• Z. Jiang, D. R. Lee, S. Narayanan, J. Wang, and S. K. Sinha. Waveguide-enhanced grazing-incidence small-angle x-ray scattering of buried nanostructures in thin films. Phys. Rev. B 84, 075440 (2011). DOI: 10.1103/PhysRevB.84.075440

[6] GISAXS review papers

• G. Renaud, R. Lazzari, and F. Leroy. Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering. Sur. Sci. Rep. 64, 255 (2009). DOI:10.1016/j.surfrep.2009.07.002

Last updated on 2013/04/05